ClassOne Technology 4900 SRD

CLASSONE TECHNOLOGY 4900 SPIN RINSE DRYER consisting of:

- Maximum Wafer Size of 12"/300mm
- Single Stack, with Roll-Around Cabinet
- Quick Disconnect Rotor (single bolt)
- Includes Rotor (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor


OPTIONAL UPGRADES AVAILABLE consisting of:

- 50-Wafer Capacity Bowl (2 cassettes)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

FREQUENTLY ASKED QUESTIONS:

- What is the footprint? 28”Wx28”Dx72”H
- How much is the water consumption? 2.0 GPM
- What is the throughput (wfr/h)? Typical Recipe – approximately 8 minutes per cycle, depending on wafer load.
- Expected uptime? 99%
- SW communication; Can the tool be integrated into fab automation systems such as LIMS or MES? SRD has a USB data logging port.