SEMITOOL 870S DUAL STACK SRD consisting of: 

- Model: 870S SRD 
- Dual Stack Front-Loading Spin Rinse Dryer (SRD)
- Controller Type: PSC-102
- Capable Of Processing Up to 6"/150mm Wafers
- Rotor Type: Quick Disconnect Single Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Black Motor (Brushless)
- Door Hinge: Right Side
- DI Recirculation: WR-10
- LC4 Controller
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Meet OEM Specifications

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of: 

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.  

SEMITOOL 870S DUAL STACK SRD consisting of:

- Model: 870S SRD
- Dual Stack Front-Loading Spin Rinse Dryer (SRD)
- Controller Type: PSC-101
- Capable Of Processing Up to 6”/150mm Wafers
- Rotor Type: Quick Disconnect Single Bolt
- Door Hinge: Left Side
- Resistivity Monitor: RM-20
- N2 Heaters
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Meet OEM Specifications

CLASSONE’S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as
needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp
errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation
and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves
both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without
excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as
needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 480S SINGLE STACK SRD consisting of:

- Model: 480S
- Max Wafer Size: 8"/200mm (Low-profile Cassette)
- Single Stack SRD
- Semitool Rollcart
- Left hinged door with lock
- Front-Loading Spin Rinse Dryer (SRD)
- PSC-101 Controller
- Resistivity Monitors (RM-20)
- Single Bolt Rotor Design
- N2 Heaters
- Power On/Off Buttons
- Start/Stop Buttons
- Power Supply: 120V 50 Hz
- Operating Manuals for Semitool 480S
- Manufactured in 2006!


CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 460S SRD consisting of:

- Model 460S SRD
- Single Stack Spin Rinse Dryer (SRD)
- Single-bolt rotor design (quick release)
- Up to 5" wafers capable
- Right hand door hinge
- PSC-101 Controller
- LC-4 Drive
- Brushless Motor
- EMO Button
- Resistivity Monitor (RM-20)
- Anti-Static with N2 Purge (CY-20)
- Operating Manuals and Documentation

SEMITOOL 460S SRD consisting of:

- Model 460S SRD
- Single Stack Spin Rinse Dryer (SRD)
- Single-bolt rotor design (quick release)
- Up to 5" wafers capable
- Right hand door hinge
- PSC-101 Controller
- LC-4 Drive
- Brushless Motor
- EMO Button
- Resistivity Monitor (RM-20)
- Anti-Static with N2 Purge (CY-20)
- Operating Manuals and Documentation

SEMITOOL 270F SINGLE STACK SRD consisting of:

- Model: 270F SRD
- Single Stack Front-Loading SRD
- Capable Of Processing Up to 6"/150mm Wafers
- PSC-102 Controller
- Rotor Type: Four Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Blue (Brushed DC)
- Door Hinge: Left Side
- DI Recirculation: WR-10
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Excellent Condition

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 270F SINGLE STACK SRD consisting of:

- Model: 270F SRD
- Single Stack Front-Loading SRD
- Capable Of Processing Up to 6"/150mm Wafers
- PSC-102 Controller
- Rotor Type: Four Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Blue (Brushed DC)
- Door Hinge: Left Side
- DI Recirculation: WR-10
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Excellent Condition

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 270F SINGLE STACK SRD consisting of:

- Model: 270F SRD
- Single Stack Front-Loading SRD
- Capable Of Processing Up to 6"/150mm Wafers
- PSC-102 Controller
- Rotor Type: Four Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Blue (Brushed DC)
- Door Hinge: Left Side
- DI Recirculation: WR-10
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Excellent Condition

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 270F SINGLE STACK SRD consisting of:

- Model: 270F SRD
- Single Stack Front-Loading SRD
- Capable Of Processing Up to 6"/150mm Wafers
- PSC-102 Controller
- Rotor Type: Four Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Blue (Brushed DC)
- Door Hinge: Left Side
- DI Recirculation: WR-10
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Excellent Condition

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

CLASSONE TECHNOLOGY 8800HP SPIN RINSE DRYER consisting of:

- Model: Trident 8800HP
- Maximum Wafer Size of 8"/200mm
- Double Stack SRD
- For High Profile Cassettes (8"/200mm)
- Quick Disconnect Rotor (single bolt)
- Includes 2 Rotors (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry (Powder Coated White)
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor


OPTIONAL UPGRADES AVAILABLE consisting of:

- Substitute White Powder Coat with Stainless Steel ($0)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

CLASSONE TECHNOLOGY 8800 SPIN RINSE DRYER consisting of:

- Model: Trident 8800 SRD

- Maximum Wafer Size of 8"/200mm
- Double Stack Spin Rinse Dryer
- Quick Disconnect Rotor (single bolt)
- Includes 2 Rotors (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry (Powder-Coated White)
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor
- Learn more about ClassOne''s All-New Trident Spin Rinse Dryer
- ClassOne Trident SRD Datasheet

OPTIONAL UPGRADES AVAILABLE consisting of:

- Substitute White Powder-Coat with Stainless Steel ($0)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

CLASSONE TECHNOLOGY 4900 SPIN RINSE DRYER consisting of:

- Maximum Wafer Size of 12"/300mm
- Single Stack, with Roll-Around Cabinet
- Quick Disconnect Rotor (single bolt)
- Includes Rotor (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor


OPTIONAL UPGRADES AVAILABLE consisting of:

- 50-Wafer Capacity Bowl (2 cassettes)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

FREQUENTLY ASKED QUESTIONS:

- What is the footprint? 28”Wx28”Dx72”H
- How much is the water consumption? 2.0 GPM
- What is the throughput (wfr/h)? Typical Recipe – approximately 8 minutes per cycle, depending on wafer load.
- Expected uptime? 99%
- SW communication; Can the tool be integrated into fab automation systems such as LIMS or MES? SRD has a USB data logging port.

CLASSONE TECHNOLOGY 4800 SPIN RINSE DRYER consisting of:

- Maximum Wafer Size of 8"/200mm
- Single Chamber, Roll-Around Cabinet
- Quick Disconnect Rotor (single bolt)
- Includes Rotor (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor


OPTIONAL UPGRADES AVAILABLE consisting of:

- 50-Wafer Capacity Bowl (2 cassettes)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

CLASSONE TECHNOLOGY 2800 SPIN RINSE DRYER consisting of:

- Maximum Wafer Size of 8"/200mm
- Single Chamber, Table Top Model
- Quick Disconnect Rotor (single bolt)
- Includes Rotor (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor


OPTIONAL UPGRADES AVAILABLE consisting of:

- 50-Wafer Capacity Bowl (2 cassettes)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

CLASSONE TECHNOLOGY 2600 SPIN RINSE DRYER consisting of:

- Maximum Wafer Size of 6"/150mm
- Single Stack SRD, Table Top Version
- Quick Disconnect Rotor (single bolt)
- Includes Rotor (customer select size)
- LCD Graphic 256 Color Display with Touch Screen
- SK1600 Programmable Logic Controller
- Direct Drive Brushless Motor
- All Stainless Steel Cabinetry
- EPO: Emergency Power Off, Front and Rear
- Mechanical Door Lock
- Foot Activated Door Open Switch
- DI Water Recirculation
- N2 Saver
- Resistivity Monitor Controller and Probe
- Static Neutralizing Bar
- Data Logger
- Heater Alarm
- Overtemp Protection
- Ultra-Pure (UP) Model: Teflon Pneumatic Valve with Pillar Fittings
- Drain-Trap Connection for Double SRD
- All Stainless Steel, Easy Access Panels
- CE Certified
- FM4910 Compliant
- Operator Manual
- 1 Year Warranty on Parts and Labor

OPTIONAL UPGRADES AVAILABLE consisting of:

- 50-Wafer Capacity Bowl (2 cassettes)
- Substitute SS Panels with FM4910 Polypro
- Light Tower with 3 Indicator Lamps (R/Y/G)
- Rear Display
- Bulk Mount
- Extended Warranty (2 years)


SYSTEM FACILITY REQUIREMENTS consisting of:

- Electrical: 208VAC, 15 Amp, 4 Wire
- Nitrogen: 1/4" OD Tubing, Internally Regulated 2-3 SCFM, 30-40 PSI.
- DI Water: 3/8" OD Tubing, Internally Regulated to 1-2 GPM, 15-30 PSI.
- CDA: 1/4" OD Tubing, 60-80 PSI
- Drain: 1" NPT PVC

SEMITOOL870S DUAL STACK SRD consisting of:- Model: 870SSRD

read more

SEMITOOL470SSRD consisting of:- Model: 470SSRD

read more

VERTEQ 1600-55A SINGLE STACK SRD consisting of:

- Model: 1600-55A
- Single Stack SRD
- Up to 6"/150mm Wafer Capable
- Resistivity Monitor
- Operations Manual
- Power: 120v, 50/60hz

CLASSONE''S VERTEQ SRD REFURBISHMENT PROCESS consists of:

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.

SEMITOOL 880S DUAL STACK SRD consisting of:

- Model: 880S
- Dual Stack Front-Loading Spin Rinse Dryer (SRD)
- PSC-102 Controllers
- Resistivity Monitors (RM-20)
- Anti Static With N2 Purge (CY-20)
- Capable of processing up to 8"/200mm wafers.
- Single bolt rotor design
- Operating Manuals and Documentation
- All our Semitool SRDs are refurbished to meet factory specifications.
- Visit our Semitool SRD Refurbishing Process Page.

Options Available:
1: Add New Rotors (manufactured to specific wafer size and cassette type and balanced to customer wafer load). Inquire for pricing.
2: Purchase system in as is condition. Inquire for pricing. Pricing below is for refurbished system with 6 month warranty

SEMITOOL 870S DUAL STACK SRD consisting of: 

- Model: 870S SRD 
- Dual Stack Front-Loading Spin Rinse Dryer (SRD)
- Controller Type: PSC-102
- Capable Of Processing Up to 6"/150mm Wafers
- Rotor Type: Quick Disconnect Single Bolt
- Resistivity Monitor: RM-20
- N2 Heaters
- Motor Type: Black Motor (Brushless)
- Door Hinge: Right Side
- DI Recirculation: WR-10
- LC4 Controller
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Meet OEM Specifications

CLASSONE''S SEMITOOL SRD REFURBISHMENT PROCESS consists of: 

- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.