SEMITOOL 870S DUAL STACK SRD consisting of:
- Model: 870S SRD
- Dual Stack Front-Loading Spin Rinse Dryer (SRD)
- Controller Type: PSC-101
- Capable Of Processing Up to 6”/150mm Wafers
- Rotor Type: Quick Disconnect Single Bolt
- Door Hinge: Left Side
- Resistivity Monitor: RM-20
- N2 Heaters
- Rotors Sold Separately (inquire for pricing)
- Operations Manual
- Refurbished to Meet OEM Specifications
CLASSONE’S SEMITOOL SRD REFURBISHMENT PROCESS consists of:
- Bowls are sent out for electro-polishing for like new condition.
- NEW Solenoids Valves are installed (ClassOne Standard).
- NEW Door Seals are installed (ClassOne Standard).
- NEW Vibration Isolators are installed (ClassOne Standard).
- NEW N2 Filters are installed (ClassOne Standard).
- NEW Rear Bowl Seals are installed (ClassOne Standard).
- All Nozzles are inspected visually, tested for spray pattern and replaced as
needed.
- Rotor Stop Positioners are inspected and serviced or replaced as needed.
- Delivery lines are repaired or replaced as needed.
- Pneumatic lines are repaired or replaced as needed.
- Wiring is repaired or replaced as needed.
- If damaged electronics are found they are repaired or replaced as needed.
- Machine Covers are inspected and replaced as needed.
- Door Windows are replaced as needed.
- System Leveling Feet are replaced as needed.
- System Wheels are replaced as needed.
- During Quality Assurance testing the system is run to verify that no temp
errors occur under normal operation.
- During Quality Assurance testing the system is run to verify RPM regulation
and stability under normal operation.
- During Quality Assurance testing the system is run to verify that the valves
both operate properly and do not leak by under normal operation.
- During Quality Assurance testing the system is run to verify without
excessive vibration normal operation.
- Where applicable ferrofluidic feed-thrus are inspected and serviced as
needed.
- Where applicable EMO Button(s) and Circuit(s) is tested.
Semitool 870S Dual Stack SRD.
6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design
N/A
Excellent Condition Guaranteed.
Fully Refurbished to Excellent Condition by ClassOne.
6 Month Warranty.
30 Day Right of Return.
6-10 weeks
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